Federal grant · National Institute of Standards and Technology

CHIPS Incentives Program – Facilities for Semiconductor Materials and Manufacturing Equipment

Status
Open
Posted
Sep 29, 2023
Closes
Nov 1, 2026
Est. total funding
—
Award range
—
Expected awards
—
Opportunity number
2023-NIST-CHIPS-SMME-01
Who can apply

Eligible applicants

An applicant must be a “covered entity” to receive CHIPS Incentives. For purposes of this NOFO, a “covered entity” means a nonprofit entity; a private-sector entity; a consortium of private-sector entities; or a consortium of nonprofit, public, and private-sector entities with a demonstrated ability to substantially finance, construct, expand, or modernize a facility relating to the fabrication, assembly, testing, advanced packaging, production, or research and development of semiconductors, materials used to manufacture semiconductors or semiconductor manufacturing equipment.

About this grant

The CHIPS Incentives Program aims to catalyze long-term economically sustainable growth in the domestic semiconductor industry in support of U.S. economic and national security. This is the second Notice of Funding Opportunity under this program and seeks applications for projects for the construction, expansion, or modernization of commercial facilities for semiconductor materials and manufacturing equipment. For more information, additional resources, and instructions on how to apply, please visit chips.gov. Note that all applications must be submitted through the CHIPS Incentives Portal at https://applications.chips.gov. If you have any questions on how to apply, please email apply@chips.gov.

Instrument
Cooperative agreement
Activity
Science, technology and other R&D
Assistance listings
11.037
Cost sharing
Not required
Last updated
Oct 16, 2025

From Grants.gov's public daily extract of Oct 25, 2026. Agency contacts, full eligibility and application packages are on Grants.gov; always confirm deadlines there before applying.

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